Devices including a near field transducer (NFT), at least one cladding layer and interlayer there between

ABSTRACT

A device that includes a near field transducer (NFT); at least one cladding layer adjacent the NFT; and a carbon interlayer positioned between the NFT and the at least one cladding layer.

PRIORITY

This application is a continuation of U.S. application Ser. No.14/796,464 filed on Jul. 10, 2015, the disclosure of which isincorporated herein by reference thereto.

BACKGROUND

Heat assisted magnetic recording (referred to herein as “HAMR”)technology is a promising approach for increasing storage density beyond1 Tbit/inch². HAMR heads can utilize near field transducers (NFTs) toheat the magnetic recording layers. Poor adhesion between the materialsof the NFT and the surrounding structures in the HAMR head can lead tofailure during processing or use. Therefore, there remains a need todecrease such failure.

SUMMARY

Disclosed are devices that include a near field transducer (NFT); atleast one cladding layer adjacent the NFT; and a carbon interlayerpositioned between the NFT and the at least one cladding layer.

Also disclosed are devices that include an energy source; a near fieldtransducer (NFT) configured to receive energy from the energy source; atleast one cladding layer adjacent the NFT; and a carbon interlayerpositioned between the NFT and the at least one cladding layer.

Further disclosed are devices that include a near field transducer(NFT); a write pole; a waveguide; a NPS cladding layer positionedbetween the NFT and the pole; a CNS cladding layer positioned betweenthe waveguide and the NFT; and at least one carbon interlayer comprisingamorphous carbon and positioned between the NPS and the NFT, the CNS andthe NFT, or both.

The above summary of the present disclosure is not intended to describeeach disclosed embodiment or every implementation of the presentdisclosure. The description that follows more particularly exemplifiesillustrative embodiments. In several places throughout the application,guidance is provided through lists of examples, which examples can beused in various combinations. In each instance, the recited list servesonly as a representative group and should not be interpreted as anexclusive list.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a magnetic disc drive that can includeHAMR devices.

FIG. 2 is a cross sectional view of a perpendicular HAMR magneticrecording head and of an associated recording medium.

FIG. 3 is a perspective view of a portion of a magnetic device includinga carbon interlayer.

FIG. 4 is a graph showing the enthalpy of mixing versus enthalpy ofsegregation of dilute-limit alloying in gold (Au), based onthermodynamic calculations.

FIG. 5 is a graph (based on thermodynamic calculations) showing theEnthalpy of Mixing vs the Enthalpy of Segregation of dilute-limitalloying in Au.

FIGS. 6A to 6E are cross sections (FIGS. 6A, 6B and 6C) showingillustrative devices including carbon interlayers and perspective viewsshowing rods of NFTs (FIGS. 6D and 6E) and a peg and disc type NFT (FIG.6F).

FIGS. 7A, 7B, and 7C show transmission electron microscopy (TEM)High-Angle Annular Dark Field image of Au after C surface treatment(FIG. 7A), secondary ion mass spectroscopy (SIMS) data from AuCo alloysshowing Zr migration (FIG. 7B), and SIMS data showing the Zr seedstabilization by C surface treatment (FIG. 7C).

The figures are not necessarily to scale. Like numbers used in thefigures refer to like components. However, it will be understood thatthe use of a number to refer to a component in a given figure is notintended to limit the component in another figure labeled with the samenumber.

DETAILED DESCRIPTION

In the following description, reference is made to the accompanying setof drawings that form a part hereof and in which are shown by way ofillustration several specific embodiments. It is to be understood thatother embodiments are contemplated and may be made without departingfrom the scope or spirit of the present disclosure. The followingdetailed description, therefore, is not to be taken in a limiting sense.

Unless otherwise indicated, all numbers expressing feature sizes,amounts, and physical properties used in the specification and claimsare to be understood as being modified in all instances by the term“about.” Accordingly, unless indicated to the contrary, the numericalparameters set forth in the foregoing specification and attached claimsare approximations that can vary depending upon the properties sought tobe obtained by those skilled in the art utilizing the teachingsdisclosed herein.

The recitation of numerical ranges by endpoints includes all numberssubsumed within that range (e.g. 1 to 5 includes 1, 1.5, 2, 2.75, 3,3.80, 4, and 5) and any range within that range.

As used in this specification and the appended claims, the singularforms “a”, “an”, and “the” encompass embodiments having pluralreferents, unless the content clearly dictates otherwise. As used inthis specification and the appended claims, the term “or” is generallyemployed in its sense including “and/or” unless the content clearlydictates otherwise.

“Include,” “including,” or like terms means encompassing but not limitedto, that is, including and not exclusive. It should be noted that “top”and “bottom” (or other terms like “upper” and “lower”) are utilizedstrictly for relative descriptions and do not imply any overallorientation of the article in which the described element is located.

FIG. 1 is a perspective view of disc drive 10 including an actuationsystem for positioning slider 12 over track 14 of magnetic medium 16.The particular configuration of disc drive 10 is shown for ease ofdescription and is not intended to limit the scope of the presentdisclosure in any way. Disc drive 10 includes voice coil motor 18arranged to rotate actuator arm 20 on a spindle around axis 22. Loadbeam 24 is connected to actuator arm 20 at head mounting block 26.Suspension 28 is connected to an end of load beam 24 and slider 12 isattached to suspension 28. Magnetic medium 16 rotates around an axis 30,so that the windage is encountered by slider 12 to keep it aloft a smalldistance above the surface of magnetic medium 16. Each track 14 ofmagnetic medium 16 is formatted with an array of data storage cells forstoring data. Slider 12 carries a magnetic device or transducer (notshown in FIG. 1) for reading and/or writing data on tracks 14 ofmagnetic medium 16. The magnetic transducer utilizes additionalelectromagnetic energy to heat the surface of medium 16 to facilitaterecording by a process termed heat assisted magnetic recording (HAMR).

A HAMR transducer includes a magnetic writer for generating a magneticfield to write to a magnetic medium (e.g. magnetic medium 16) and anoptical device to heat a portion of the magnetic medium proximate to thewrite field. FIG. 2 is a cross sectional view of a portion of a magneticdevice, for example a HAMR magnetic device 40 and a portion ofassociated magnetic storage medium 42. HAMR magnetic device 40 includeswrite pole 44 and return pole 46 coupled by pedestal 48. Coil 50comprising conductors 52 and 54 encircles the pedestal and is supportedby an insulator 56. As shown, magnetic storage medium 42 is aperpendicular magnetic medium comprising magnetically hard storage layer62 and soft magnetic underlayer 64 but can be other forms of media, suchas patterned media. A current in the coil induces a magnetic field inthe pedestal and the poles. Magnetic flux 58 exits the recording head atair bearing surface (ABS) 60 and is used to change the magnetization ofportions of magnetically hard layer 62 of storage medium 42 enclosedwithin region 58. Near field transducer 66 is positioned adjacent thewrite pole 44 proximate air bearing surface 60. Near field transducer 66is coupled to waveguide 68 that receives an electromagnetic wave from anenergy source such as a laser. An electric field at the end of nearfield transducer 66 is used to heat a portion 69 of magnetically hardlayer 62 to lower the coercivity so that the magnetic field from thewrite pole can affect the magnetization of the storage medium.

Magnetic devices disclosed herein can also include other structures.Magnetic devices disclosed herein can also be incorporated into largerdevices. For example, sliders can include magnetic devices as disclosedherein. Exemplary sliders can include a slider body that has a leadingedge, a trailing edge, and an air bearing surface. The write pole, readpole, optical near field transducer and contact pad (and optional heatsink) can then be located on (or in) the slider body. Such exemplarysliders can be attached to a suspension which can be incorporated into adisc drive for example.

FIG. 3 depicts a partial perspective view of a portion of a magneticdevice. The magnetic device 300 can include a write pole 305 (which mayhave characteristics as discussed above) and a near field transducer(NFT) 310. The NFT 310 depicted in FIG. 3 can be any type or structureof NFT (for example plasmonic gap type NFTs or peg and disc type NFTs,which can also be referred to as “lollipop” type NFTs). Typically, theNFT 310 can be made of materials, such as for example gold (Au), gold(Au) doped with another material (for example, AuGe), silver (Ag),silver (Ag) doped with another material (for example, AgGe), copper(Cu), and aluminum (Al). In some embodiments, the NFT 310 can also bemade of materials listed in U.S. Patent Publication 2011/0205863entitled “HAMR NFT Materials with Improved Thermal Stability,” filedFeb. 23, 2011, the disclosure of which is incorporated herein byreference thereto. Such materials can include gold and at least one ofCu, Rh, Ru, Ag, Ta, Cr, Al, Zr, V, Pd, Ir, Co, W, Ti, Mg, Fe, or Modopant. The dopant concentration can range from 0.5% to 30%. Suchmaterials can also include gold and a nanoparticle oxide or nitridedopant. The nanoparticle can have a size in a range from 1 to 5 nm. Thedopant can include an oxide of at least one of: V, Zr, Mg, Ca, Al, Ti,Si, Ce, Y, Ta, W, or Th. The dopant can also include one of: V₂O₅, ZrO₂,MgO, CaO, Al₂O₃, TiO₂, SiO₂, CeO₂, Y₂O₃, Ta₂O₅, WO₂, or ThO₂. The dopantcan also include a nitride including at least one of: Ta, Al, Ti, Si,In, Fe, Zr, Cu, W or B Nitride.

A disclosed magnetic device also includes at least one cladding layer.The exemplary magnetic device 300 includes front cladding 315 and 320,bottom cladding 325, and top cladding 330. Generally, a NFT 310 isentirely surrounded by cladding materials. The at least one claddinglayer (and in this embodiment, the illustrative front cladding 315 and320, the bottom cladding 325, and the top cladding 330) can generally beformed from dielectric materials having low (relative to the material ofthe NFT) index of refractions. Exemplary materials include Y₂O₃, Ta₂O₅,Al₂O₃, SiO₂, MgO, MgF₂, Si₃N₄, SiON, and TaSiO_(x). Materials disclosedin U.S. Patent Publication No. 2011/0205864, entitled “Optical WaveguideClad Material”, filed Feb. 23, 2011, the disclosure of which isincorporated herein by reference thereto, can also be utilized for thefront cladding 315 and 320, the bottom cladding 325, the top cladding330, or some combination thereof. In embodiments, the cladding layersare made of Al₂O₃ or SiO₂ for example.

It can often be difficult to get the NFT, which can be gold, forexample, to adhere well to the surrounding cladding layers. It will benoted that the following discussion refers to a gold (Au) NFT, but allconsiderations are equally applicable with other plasmonic materials.Two of the reasons Au possesses poor mechanical robustness and thermalstability are its inherently low hardness and high grain boundarymobility (i.e. grains that are easily coarsened and plasticallyreflowed). One proposed method to improve the mechanical robustness ofAu is through doping. Through the addition of another element into theAu NFT, the grains can be refined and the boundaries can be stabilizedby lowering the grain boundary energy and/or by solute pinning of thegrain boundaries. These alloying additions, however, will nominallydegrade the thermal conductivity and the optical properties, compared tothat of pure Au.

Another attributing failure mechanism is the characteristics of theAu/oxide interface. In current HAMR NFT designs, the Au NFT issurrounded by oxide cladding materials (e.g. SiO₂ or Al₂O₃) for core-NFTspacer (CNS) and NFT-pole spacer (NPS), as discussed above. An Au/oxideinterface is known to be weak based on surface energies and boundarycoherency. While Au has a higher surface energy (1.5 J/m²), the typicaloptical cladding oxides used in HAMR have much lower values (e.g. 0.2J/m for SiO₂ and 0.9 J/m for Al₂O₃). Such a low surface energy, as wellas a high interfacial energy between Au and oxide, makes itenergetically favorable for Au to detach from the surrounding oxides,which could lead to interfacial diffusion and peg deformation. It isthought, but not relied upon, that this may be the mechanism by whichthe Au atoms from within the NFL peg are able to diffuse back into thedisk, causing recession.

Disclosed devices include a relatively thin, non-metal layer between themetal of the peg and the surrounding dielectric material. It is thought,but not relied upon that this thin non-metal layer could increase thework required to create a free surface at the NFT/dielectric interfaceby increasing the associated adhesion. In some embodiments, therelatively thin, non-metal layer includes carbon, in some embodimentsamorphous carbon.

It is thought that carbon's thermodynamic properties when mixed withgold may be beneficial to the system. Based on thermodynamiccalculations, carbon possesses the highest enthalpy of segregation ofany element in gold, and it has a small magnitude, negative enthalpy ofmixing, as shown in the graph in FIG. 4. Because of these properties,carbon between the NFT and dielectric should remain in the surface/nearsub-surface region of the NFT metal.

Furthermore, as seen in FIG. 5, from plotting the atomic size difference(compared to Au, for example) and the electronegativity difference(compared to Au, for example) according to the Darken-Gurry method,carbon is one of two elements that could possibly be an interstitialwithin an Au lattice structure.

This favorable combination of atomic size and electronegativitydifferences may allow the surface and the near sub-surface region of theAu to be densified by the addition of C atoms. Therefore, in someembodiments, disclosed interlayers can include carbon, for exampleamorphous carbon. Amorphous carbon may be useful in interlayers becauseit can be considered somewhat reactive. Amorphous carbon, as opposed tocrystalline carbon (which is also referred to as diamond like carbon(DLC)) has some carbons that are not bonded to neighboring carbons.These non-bonded carbons are therefore somewhat reactive and thus have ahigher diffusivity, which may allow it to be incorporated into thelattice of the NFT material (e.g., gold).

Disclosed interlayers can be included adjacent to one or more of thesurfaces of a NFT. A disclosed interlayer can generally be locatedbetween a surface of an NFT and an adjacent surrounding cladding layer.Regardless of the position of the interlayer(s), it (or they) can bedescribed by its average thickness. In embodiments, disclosedinterlayers can have an average thickness of not less than 0.5 nm, notless than 1 nm, or in some embodiments not less than 2 nm. Inembodiments, disclosed interlayers can have an average thickness of notgreater than 20 nm, not greater than 15 nm, in some embodiments notgreater than 12 nm, or in some embodiments not greater than 5 nm. Insome embodiments, a disclosed interlayer can have a thickness between0.5 nm and 2.5 nm.

The average thickness of an interlayer (or another layer) can bemeasured by transmission electron microscopy (TEM), or x-rayphotoelectron spectroscopy (XPS) for example. The thickness can bedetermined using calibration from standard samples having knownthicknesses.

In embodiments, an interlayer can be positioned between each surface ofthe NFT and each surrounding cladding layer; and in embodiments, aninterlayer can be positioned between less than each surface of the NFTand the surrounding cladding layers. In embodiments, an interlayer canbe positioned between surfaces of the NFT that are in contact with thefront cladding layers 315 and 320, the bottom cladding layer 325, thetop cladding layer 330, or some combination thereof, as seen in FIG. 3.In some embodiments, an interlayer can be in contact with substantiallyof the front cladding layers 315 and 320, and substantially all of thebottom cladding layer 325. In some embodiments, deposition processescould be controlled so that the interlayer preferentially contacts someor all of the surfaces of the various cladding layers.

FIGS. 6A to 6E provide illustrative embodiments of devices that includedisclosed interlayers. FIG. 6A shows a disclosed device depicted in alayer format. Such a device can include a bottom cladding or a core toNFT space (CNS) 630, an optional seed layer 615 disposed thereon, a NFT610, a top cladding or a NFT to pole space (NPS) 625 and a carboninterlayer 620 disposed between the NPS 625 and the NFT 610. In such anembodiment, the carbon interlayer 620 can be deposited after formationof the NFT 610 and before deposition of the NPS 625. In someillustrative embodiments, the carbon interlayer 620 can be annealed toinfluence interdiffusion of the carbon into the near sub-surface of theNFT metal. This optional step can be described as forming an interdiffused metal-carbon layer which was formed from some top portion ofthe NFT and some bottom (or all) portion of the deposited carboninterlayer. The optional anneal step can be undertaken before, after, orboth the NPS 625 is deposited. In some embodiments that include anannealing of the amorphous carbon before NPS deposition, an optionalstep of removing carbon not inter-diffused into the NFT can also beundertaken. The removal step can be done, for example, by ashing, e.g.,oxygen (O₂) ashing.

In some embodiments where a portion of the carbon not interdiffused intothe NFT metal (e.g., leaving at least some material that can bedescribed as an interdiffused metal-carbon interlay) is removed, aninterdiffused metal-carbon interlayer or an interdiffused interlayerthat exists between the NFT and a cladding layer can be described by anaverage thickness thereof. Disclosed interdiffused interlayers can havean average thickness of not less than 5 nm, not less than 3 nm, or insome embodiments not less 1 nm. In embodiments, disclosed interdiffusedinterlayers can have an average thickness of not greater than 10 nm, notgreater than 5 nm, or in some embodiments not greater than 3 nm. In someembodiments, a layer of material can be deposited, and then some of thatmaterial can be interdiffused into the NFT metal. Once some of thematerial has been interdiffused, the thickness of the layer can actuallydecrease (even if some of the material is not removed afterinterdiffusion). In some embodiments, a layer of material (e.g.,amorphous carbon) not greater than 10 nm (in some embodiments from 5 nmto 10 nm for example) can be deposited and then at least some of thematerial can be interdiffused in the NFT material. After interfusion,the layer may be thinner than originally deposited and optionally someof the material originally deposited can be removed.

FIG. 6B shows a disclosed device, also depicted in a layer format, thatincludes a CNS 630, a NFT 610, and a NPS 625. This illustrative deviceincludes a first carbon interlayer 620 between the NFT 610 and the NPS625 and a second carbon interlayer 635 between the NFT 610 and the CNS630. The first carbon interlayer and the second carbon interlayer can,but need not be the same. Either or both of them may optionally beannealed to influence diffusion of some of the carbon into the nearsub-surfaces of the NFT metal. Similarly, either or both of them mayhave some portion of the carbon not interdiffused, optionally removedvia a step, such as ashing (e.g., O₂ ashing).

FIG. 6C shows a disclosed device, also depicted in layer format thatincludes a CNS 630, a NFT 610, and a NPS 625. This illustrative deviceincludes a first carbon interlayer 620 between the NFT 610 and the NPS625 and a mid carbon interlayer 640 that can be described as beingwithin the NFT 610, or similarly described as being surrounded by NFTmaterial. Such a device may include a second carbon interlayerpositioned between the NFT 610 and the CNS 630 or a seed layer (as wasseen in FIG. 6A). Either or both of them (as well as the optional secondcarbon interlayer) may optionally be annealed to influence diffusion ofsome of the carbon into the near sub-surfaces of the NFT metal.Similarly, either or both of them may have some portion of the carbonnot interdiffused, optionally removed via a step, such as ashing (e.g.,O₂ ashing). In some embodiments, the mid carbon interlayer 640 can bedeposited after some portion of the NFT 610 has been deposited, annealedto influence inter-diffusion into the near sub-surface of the NFT metallayer, then optionally some portion of the deposited mid carbon layermaterial can be removed (e.g., via O₂ ashing) and then additional NFTmaterial can be deposited. It is thought, but not relied upon that a midcarbon interlayer may provide a carbon source within the NFT materialitself. This carbon source, upon anneal may increase the depth of carbonpenetration into the NFT material. Such an optional mid layer may afforda smoother carbon gradient into the NFT material, which may allow thesurface energy to be displaced across a larger distance.

FIG. 6D depicts a perspective view of a rod 650 of a NFT that has beenformed on a seed layer 615 on a CNS 630. Covering three surfaces, inthis case, of the rod 650 is a carbon interlayer 655. The carboninterlayer 655 can have properties (e.g., thicknesses, annealed or not,partially removed or not, etc.) such as those described above. The threesurfaces of the rod 650 that are covered can be described as the top andsides of the rod. Such a carbon interlayer can be deposited afterdeposition and formation of the rod.

FIG. 6E depicts a perspective view of a rod 652 of a NFT that has beenformed on a seed layer 615 on a CNS 630. Covering four surfaces, in thiscase of the rod 652 is a carbon interlayer 656. The carbon interlayer656 can have properties (e.g., thicknesses, annealed or not, partiallyremoved or not, etc.) such as those described above. The four surfacesof the rod 652 that are covered can be described as the bottom, top andsides of the rod. Such a carbon interlayer can be deposited beforedeposition of the NFT material and after formation of the rod.

FIG. 6F depicts a perspective view of a lollipop NFT (e.g., a NTL) thathas been formed on a seed layer 615 on a CNS 630. The NFT in thisembodiment includes a disc 654 and a peg 653. Covering all sides andtops of the disc 654 and the peg 653 is the carbon interlayer 657. Thisparticularly depicted carbon interlayer 657 only covers all sidesurfaces and top surfaces of the peg and disc, but it should beunderstood that a carbon interlayer could also have been formed underthe peg, the disc or both before they were formed. The carbon interlayer657 can have properties (e.g., thicknesses, annealed or not, partiallyremoved or not, etc.) such as those described above. The surfaces of thepeg 653 and the disc 654 that are covered can be described as the topand sides. Such a carbon interlayer can be deposited before depositionof the NFT material and after deposition and formation of the rod butbefore deposition of the NPS material which would cover all surfaces ofthe peg 653 and the disc 654 (or the entire carbon interlay 657).

Disclosed carbon interlayers can include carbon, for example amorphouscarbon. Disclosed carbon interlayers can be deposited using knownmethods including, for example, physical vapor deposition (PVD) methods(e.g., sputtering, ion beam deposition (IBD), etc.), chemical vapordeposition (CVD) methods, other deposition methods, or any combinationsthereof. Creation of carbon interlayers and optional processing (e.g.,annealing, removal, etc.) can also be incorporated into known processesor methods of producing devices such as devices including NFTs.

EXAMPLES

While the present disclosure is not so limited, an appreciation ofvarious aspects of the disclosure will be gained through a discussion ofthe examples provided below.

In the initial studies done at sheet film level, a change in thecolumnar microstructure was observed within the top ˜2 nm of the Aufilms when C was deposited on the surface and annealed, as shown in FIG.7A. This increased density and change in microstructure also proved, bysecondary ion mass spectrometry (SIMS) analysis, to keep the Zr seedlayer in place. Seed layer stability has been an issue in many Au-basedalloys, as shown in FIG. 7B leading to grain structure instability inother NFT material systems. The Au-aC system provided added stabilityfor the Zr seed, presented in FIG. 7C. Since the C layer had this effecton the Zr seed layer, it is believed that it would have a similar effectin stabilizing the equilibrium position of alloying elements present inthe peg material.

In addition, in sheet film studies, it was found that the Au/Al₂O₃interface failed adhesion tests 10 out of 25 times after annealing. Whena C layer was present at this interface, the system failed the adhesiontest 0 out of 25 times. The table of these results is presented in Table1 below. It is believed that the C in the experimentally studiedAu/Al₂O₃ system acted to increase the work energy needed to separatethese surfaces.

TABLE 1 Adhesion Test Results Average (Passed/Total) Thickness 400° C./500° C./ Sample (nm) As Dep. 3 hrs 3 hrs Control Y₂O₃/Au/Y₂O₃ 25.8 23/2521/25 1 Y₂O₃/Au + 2.5 nm aC/Y₂O₃ 26.66 25/25 25/25 23/25 2 Y₂O₃/Au + 10nm aC/Y₂O₃ 26.96 25/25 25/25 21/25 Control Al₂O₃/Au/Al₂O₃ 25.8 21/2515/25 1 Al₂O₃/Au + 2.5 nm aC/Al₂O₃ 27.32 25/25 25/25 25/25 2 Al₂O₃/Au +10 nm aC/Al₂O₃ 26.06 25/25 25/25 24/25 Control Al₂O₃/AuCo/Al₂O₃ 50 25/2514/25 1 Al₂O₃/AuCo + 10 nm aC/Al₂O₃ 27.84 25/25 25/25 23/25 2Al₂O₃/AuCo + 2.5 nm aC/Al₂O₃ 27.7 25/25 25/25 21/25

Finally, the optical constants measured through ellipsometry have shownthat the optic penalty associated with the C surface treatment is lessthan that of other alloying and adhesion methods that have been claimedand attempted. This low optic penalty will translate to a lower NFTtemperature rise associated with using this material system. There are afew embodiments depicted below that would allow for effectiveapplication of such a C layer into an NFT material system.

All scientific and technical terms used herein have meanings commonlyused in the art unless otherwise specified. The definitions providedherein are to facilitate understanding of certain terms used frequentlyherein and are not meant to limit the scope of the present disclosure.

As used in this specification and the appended claims, “top” and“bottom” (or other terms like “upper” and “lower”) are utilized strictlyfor relative descriptions and do not imply any overall orientation ofthe article in which the described element is located.

As used in this specification and the appended claims, the singularforms “a”, “an”, and “the” encompass embodiments having pluralreferents, unless the content clearly dictates otherwise.

As used in this specification and the appended claims, the term “or” isgenerally employed in its sense including “and/or” unless the contentclearly dictates otherwise. The term “and/or” means one or all of thelisted elements or a combination of any two or more of the listedelements.

As used herein, “have”, “having”, “include”, “including”, “comprise”,“comprising” or the like are used in their open ended sense, andgenerally mean “including, but not limited to”. It will be understoodthat “consisting essentially of”, “consisting of”, and the like aresubsumed in “comprising” and the like. For example, a conductive tracethat “comprises” silver may be a conductive trace that “consists of”silver or that “consists essentially of” silver.

As used herein, “consisting essentially of,” as it relates to acomposition, apparatus, system, method or the like, means that thecomponents of the composition, apparatus, system, method or the like arelimited to the enumerated components and any other components that donot materially affect the basic and novel characteristic(s) of thecomposition, apparatus, system, method or the like.

The words “preferred” and “preferably” refer to embodiments that mayafford certain benefits, under certain circumstances. However, otherembodiments may also be preferred, under the same or othercircumstances. Furthermore, the recitation of one or more preferredembodiments does not imply that other embodiments are not useful, and isnot intended to exclude other embodiments from the scope of thedisclosure, including the claims.

Also herein, the recitations of numerical ranges by endpoints includeall numbers subsumed within that range (e.g., 1 to 5 includes 1, 1.5, 2,2.75, 3, 3.80, 4, 5, etc. or 10 or less includes 10, 9.4, 7.6, 5, 4.3,2.9, 1.62, 0.3, etc.). Where a range of values is “up to” a particularvalue, that value is included within the range.

Use of “first,” “second,” etc. in the description above and the claimsthat follow is not intended to necessarily indicate that the enumeratednumber of objects are present. For example, a “second” substrate ismerely intended to differentiate from another infusion device (such as a“first” substrate). Use of “first,” “second,” etc. in the descriptionabove and the claims that follow is also not necessarily intended toindicate that one comes earlier in time than the other.

Thus, embodiments of devices including a near field transducer (NFT), atleast one cladding layer and interlayer there between are disclosed. Theimplementations described above and other implementations are within thescope of the following claims. One skilled in the art will appreciatethat the present disclosure can be practiced with embodiments other thanthose disclosed. The disclosed embodiments are presented for purposes ofillustration and not limitation.

What is claimed is:
 1. A device comprising: a near field transducer(NFT), the NFT comprising gold and at least one of Cu, Rh, Ru, Ag, Ta,Cr, Al, Zr, V, Pd, Ir, Co, W, Ti, Mg, Fe, or Mo dopant; an oxide dopantcomprising at least one of: V, Zr, Mg, Ca, Al, Ti, Si, Ce, Y, Ta, W, orTh; or a nitride dopant comprising at least one of: Ta, Al, Ti, Si, In,Fe, Zr, Cu, W or B, and the NFT having sides, top and a bottom; at leastone cladding layer adjacent the NFT; and a carbon interlayer positionedbetween the NFT and the at least one cladding layer.
 2. The deviceaccording to claim 1, wherein the NFT has a dopant concentration in arange from 0.5% to 30%.
 3. The device according to claim 1, wherein theNFT comprises gold and Rh.
 4. The device according to claim 1, whereinthe at least one cladding layer comprises Y₂O₃, Ta₂O₅, Al₂O₃, SiO₂, MgO,MgF2, Si₃N₄, SiON, TaSiO_(x), or combinations thereof.
 5. The deviceaccording to claim 1, wherein the carbon interlayer comprises amorphouscarbon.
 6. The device according to claim 1, wherein the carboninterlayer has a thickness from about 2 nm to about 15 nm.
 7. The deviceaccording to claim 1, wherein the carbon interlayer is positioned on atleast the sides and top of the NFT.
 8. The device according to claim 1,wherein the carbon interlayer is positioned on at least the sides, topand bottom of the NFT.
 9. The device according to claim 1, wherein thecarbon interlayer comprises at least some metal from the NFT, whereinthe metal from the NFT diffused into the amorphous carbon, carbondiffused into the NFT metal, or a combination thereof.
 10. The deviceaccording to claim 9, wherein the NFT comprises gold and a dopantselected from an oxide or nitride in the form of a nanoparticle.
 11. Adevice comprising: an energy source; a near field transducer (NFT)configured to receive energy from the energy source, the NFT comprisinggold and at least one of Cu, Rh, Ru, Ag, Ta, Cr, Al, Zr, V, Pd, Ir, Co,W, Ti, Mg, Fe, or Mo dopant; an oxide dopant comprising at least one of:V, Zr, Mg, Ca, Al, Ti, Si, Ce, Y, Ta, W, or Th; or a nitride dopantcomprising at least one of: Ta, Al, Ti, Si, In, Fe, Zr, Cu, W or B, andthe NFT having sides, top and a bottom; at least one cladding layeradjacent the NFT; and a carbon interlayer positioned between the NFT andthe at least one cladding layer.
 12. The device according to claim 11,wherein the carbon interlayer comprises amorphous carbon.
 13. The deviceaccording to claim 11, wherein the carbon interlayer has a thicknessfrom about 2 nm to about 15 nm.
 14. The device according to claim 11,wherein the carbon interlayer is positioned on at least the sides andtop of the NFT.
 15. The device according to claim 11, wherein the carboninterlayer is positioned on at least the sides, top and bottom of theNFT.
 16. The device according to claim 11, wherein the carbon interlayercomprises at least some a metal from the NFT, wherein the metal from theNFT diffused into the amorphous carbon, carbon diffused into the NFTmetal, or a combination thereof.
 17. The device according to claim 16,wherein the NFT comprises gold and a dopant selected from an oxide ornitride in the form of a nanoparticle.
 18. The device according to claim11 further comprising a waveguide, the waveguide configured to receivethe energy from the energy source and couple it into the NFT.
 19. Adevice comprising: a near field transducer (NFT), the NFT comprisinggold and at least one of Cu, Rh, Ru, Ag, Ta, Cr, Al, Zr, V, Pd, Ir, Co,W, Ti, Mg, Fe, or Mo dopant; an oxide dopant comprising at least one of:V, Zr, Mg, Ca, Al, Ti, Si, Ce, Y, Ta, W, or Th; or a nitride dopantcomprising at least one of: Ta, Al, Ti, Si, In, Fe, Zr, Cu, W or B, andthe NFT having sides, top and a bottom; a write pole; a waveguide; a NFTto pole space (NPS) cladding layer positioned between the NFT and thepole; a core to NFT space (CNS) cladding layer positioned between thewaveguide and the NFT; and at least one carbon interlayer comprisingamorphous carbon and positioned between the NPS and the NFT, the CNS andthe NFT, or both.
 20. The device according to claim 19, wherein the NFTcomprises gold and Rh.